JPH0327039U - - Google Patents
Info
- Publication number
- JPH0327039U JPH0327039U JP8823789U JP8823789U JPH0327039U JP H0327039 U JPH0327039 U JP H0327039U JP 8823789 U JP8823789 U JP 8823789U JP 8823789 U JP8823789 U JP 8823789U JP H0327039 U JPH0327039 U JP H0327039U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- thermocouple mounting
- insertion hole
- processing chamber
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003780 insertion Methods 0.000 claims 2
- 230000037431 insertion Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000002345 surface coating layer Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8823789U JPH0632680Y2 (ja) | 1989-07-27 | 1989-07-27 | 半導体製造装置の加熱炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8823789U JPH0632680Y2 (ja) | 1989-07-27 | 1989-07-27 | 半導体製造装置の加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0327039U true JPH0327039U (en]) | 1991-03-19 |
| JPH0632680Y2 JPH0632680Y2 (ja) | 1994-08-24 |
Family
ID=31637860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8823789U Expired - Lifetime JPH0632680Y2 (ja) | 1989-07-27 | 1989-07-27 | 半導体製造装置の加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632680Y2 (en]) |
-
1989
- 1989-07-27 JP JP8823789U patent/JPH0632680Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632680Y2 (ja) | 1994-08-24 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |